Development of Planar Optical Waveguides using UV-Patternable Hybrid Sol-gel Coating
نویسندگان
چکیده
Ridge and buried channel waveguides were fabricated on different substrates such as SiO2-on-Si, Si, glass wafers and Printed Circuit Boards by a sol-gel processing together with a photolithography process using photopatternable hybrid sol-gel materials. Thick sol-gel films of up to 100 microns were developed using a modified sol-gel process and ridge waveguides with vertical smooth sidewalls were obtained. The refractive index of the coatings can be varied in a large range by modifying some components of the sol-gel precursor while the coating quality was retained.
منابع مشابه
Process Optimisation of Thick UV-patternable Hybrid Sol-gel Coating Development
We report on the fabrication and characterization of thick UV-patternable hybrid sol-gel films by spin coating using a modified sol-gel process. Thick coating of 25 microns with crack-free surface can be produced by one spin coating step. Thick layers of more than 100 μm can be obtained with a multi-coating process. Characterization using different techniques including optical microscope and at...
متن کاملStructural and optical characterisation of planar waveguides obtained via Sol-Gel
Planar waveguides of SiO2:TiO2 (multilayer structure) and SiO2:CeO2 (thick layer) were prepared onto commercial glass substrates using a sol-gel technique combined with dip-coating. These glassy coatings were structural characterised by Transmission Electron Microscopy (TEM) Energy Dispersive X-ray analysis and by Confocal Microscopy. Thicknesses of 1230 nm and 4,15 μm and refractive indices of...
متن کاملOptical and fluorescent properties of Y2O3 sol–gel planar waveguides containing Tb3+ doped nanocrystals
Terbium doped Y2O3 planar waveguides were fabricated by sol–gel process and dip-coating using yttrium acetate as precursor. Two different doping modes were compared, i.e. introduction in the sol of dispersed Tb3+ions from dissolved Tb(NO3)3, or of nanoparticles of Tb2O3 or [Y2O3:50% Tb] from an alcoholic suspension. The chemical and nanostructural properties were analyzed by infrared spectrosco...
متن کاملPhotochemical reactions in fluorinated sol–gel hybrid materials doped with a photolocking agent for direct micropatterning
We report on photochemical reactions in the fluorinated sol–gel hybrid materials doped with a photolocking agent consisting of 3-trimethoxysilylpropyl methacrylate (MPTS), heptadecafluorodecyltrimethoxysilane (PFAS), zirconium n-propoxide (ZPO), and methacrylic acid (MAA). We investigated the effect of the types and density of the photoinitiator, UV fluence, and the illuminating wavelength regi...
متن کاملPlanar and UV written channel optical waveguides prepared with siloxane– poly(oxyethylene)–zirconia organic–inorganic hybrids. Structure and optical properties
Organic–inorganic hybrids were prepared using ureapropyltriethoxysilane, methacryloxypropyltrimethoxysilane and acrylic acid modified zirconium(IV) n-propoxide precursors and were characterized by small angle X-ray scattering, X-ray diffraction and photoluminescence spectroscopy. The results indicate an effective interaction between the zirconium-based nanoparticles and the siliceous nanodomain...
متن کامل